[
{"area":"Diff",reportId:22667,fab:FAB16,line:P1,samplingData:"2025-02-17",remark:984,sampleName:"ADPNA1",applicationNum:59125,toolID:"ADPNA1(AXGC02)",system:"AMC",elements:{
CXF:0.1,CON:0.2,Toluene:0.1,TMB_SQ:0.2,PGME:0.1,PGMEA:0.1,IPA:1.3,TVOC1:3.7,Mecl2:3.0,Acetone:3.7
},
samplingpoint:ADPNA1,tank:NA,machineType:GCMS,thresholdType:0},
{area:BE-Bench,reportId:22667,fab:FAB16,line:P1,samplingData:"2025-02-17",remark:990,sampleName:ADSTST,applicationNum:59126,toolID:ADSTST(AXGC02),system:AMC,elements:{
CXF:0.1,CON:0.9,Toluene:0.1,TMB_SQ:0.2,PGME:0.1,PGMEA:0.1,IPA:6.2,TVOC1:3.5,Mecl2:4.2,Acetone:3.2
},
samplingPoint:"ADSTST",tank:NA,machineType:"GCMS",thresholdType:0
}
]